A New Honey Comb Device To Protect Expensive Quartz Window Of View Port

In the past years, a new honey comb device which provides a solution to solve the contamination problem on quartz window of view port was developed.  From time to time, the contamination on the quartz (or pyrex) window of the view port in the processes of plasma CVD, etching, sputtering, arc PVD, evaportation PVD always causes higher maintenance costs and lower productivity.  Nowadays a state-of-the-art honey comb device is well-developed.

Fig. 1  Temperature duration up to 600°C without
                center ring in CF type.  In KF type with center
               ring,the maximum temperature is up to 200°C.

There are several selections to fit the view port's type and dimension.  With the aid of this honey comb protection device, the quartz (or pyrex) window can be protected not to be contaminated.  It's also very easy to clean this device by following some simple instructions.



Fig. 2  Different diameters are available.

We are very appreciated in the pictures provided by PLASUS.